Detailed characterization of the Ti-O based thin films obtained by cathodic arc evaporation
| Autor: | Nenad Bundaleski, Ilija Nasov, Vukoman Jokanović, Bojan Jokanović, Manuela Ferarra, Božana Čolović |
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| Rok vydání: | 2021 |
| Předmět: |
010302 applied physics
Materials science XRD Evaporation Analytical chemistry 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Cathodic protection Characterization (materials science) Arc (geometry) FTIR 0103 physical sciences SEM XPS General Materials Science Thin film titanium oxide thin films 0210 nano-technology ellipsometry |
| Zdroj: | Zaštita materijala Zaštita materijala (2021) 62(1):41-50 |
| ISSN: | 0351-9465 |
| Popis: | Physicochemical properties of thin films on the base of titanium oxides, obtained by a cathodic arc evaporation on the surface of glass substrate are analysed in details. The analysis of these films was made by using XRD, FTIR, SEM, XPS analysis and ellipsometry. On the basis of these analyses, particularly analysis obtained by XPS, the oxidative state Ti and corresponding phases are determined through various film layers from the surface to the substrate. The depth of the various levels and their extinction coefficients and refractory indexes are estimated by ellipsometry. |
| Databáze: | OpenAIRE |
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