Lead-free (K 0.5 Na 0.5 )NbO 3 thin films by pulsed laser deposition driving MEMS-based piezoelectric cantilevers
| Autor: | Guus Rijnders, Matthijn Dekkers, Hien T. Vu, Hung N. Vu, Minh D. Nguyen, Evert Pieter Houwman |
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| Přispěvatelé: | Inorganic Materials Science, Faculty of Science and Technology |
| Rok vydání: | 2016 |
| Předmět: |
Cantilever
Materials science Silicon on insulator 02 engineering and technology 01 natural sciences law.invention Pulsed laser deposition law 0103 physical sciences General Materials Science Thin film METIS-315867 010302 applied physics Microelectromechanical systems business.industry Mechanical Engineering IR-100117 021001 nanoscience & nanotechnology Condensed Matter Physics Polarization (waves) Piezoelectricity Capacitor Mechanics of Materials 2023 OA procedure Optoelectronics 0210 nano-technology business |
| Zdroj: | Materials letters, 164, 413-416. Elsevier |
| ISSN: | 0167-577X |
| Popis: | Thin film capacitors of the lead-free (K0.5Na0.5)NbO3 (KNN) with (100) orientation were grown on Pt/Ti/SiO2/SOI (silicon-on-insulator) substrates by pulsed laser deposition. The films are pure phases and do not show other crystal orientations. The remnant polarization Pr, saturation polarization Psat, longitudinal d33,f and transverse (d31,f and e31,f) piezoelectric coefficients of the KNN films were determined (Pr=12.6 µC/cm2, Psat=25.0 µC/cm2, d33,f=58 pm/V, d31,f=−42 pm/V and e31,f=−5.6 C/m2). These values are well comparable with the highest values reported for lead-free films of different compositions and therefore these KNN films form a potential alternative to PZT films in lead-free MEMS applications. |
| Databáze: | OpenAIRE |
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