Chemical force microscopy for hot-embossing lithography release layer characterization

Autor:	Arnaud Ott, Hélène Roberge, Teodor Veres, Neil S. Cameron
Rok vydání:	2020
Předmět:	Olefin fiber Chemical force microscopy Chemical engineering Chemistry Monolayer Analytical chemistry General Chemistry Atmospheric temperature range Condensed Matter Physics Glass transition Lithography Layer (electronics) Characterization (materials science)
Zdroj:	Soft matter. 2(7)
ISSN:	1744-6848
Popis:	We employed variable temperature chemical force microscopy (VT-CFM) using tips silanized with four different hydro- and hydrofluoroalkyl self-assembling monolayers (SAMs) interacting with a thin-film of poly(cyclic olefin), (PCO) to model the hot-embossing stamp-polymer interaction over a temperature range spanning the glass transition of the PCO.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1cf9587aba069b9369b3c4494ad69e94 https://pubmed.ncbi.nlm.nih.gov/32680233 Zobrazit plný text záznamu