Rear passivated mc-Si solar cells textured by atmospheric pressure dry etching
| Autor: | Bishal Kafle, Jochen Rentsch, Rahul Pandey, Marc Hofmann, Laurent Clochard, Michael Pittroff, Ahmed Ismail Ridoy, Thomas Schwarze, Pierre Saint-Cast, Ralf Preu |
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| Přispěvatelé: | Publica |
| Rok vydání: | 2017 |
| Předmět: |
Materials science
Silicon Passivation chemistry.chemical_element 02 engineering and technology Lichteinfang 01 natural sciences law.invention Atomic layer deposition Optics law 0103 physical sciences Solar cell ddc:530 Passivierung Wafer Oberflächen: Konditionierung 010302 applied physics business.industry Physics Contact resistance Plasmatechnologie 021001 nanoscience & nanotechnology Isotropic etching Silicium-Photovoltaik chemistry Photovoltaik Optoelectronics Dry etching 0210 nano-technology business |
| Zdroj: | Energy procedia, 124, 260–266 |
| ISSN: | 1876-6102 |
| Popis: | In this contribution, atmospheric pressure dry etching (ADE) texture is integrated into a passivated emitter and rear cell (PERC) process. In order to make the texture suitable for the solar cell processing, two post-etching processes (inverted pyramid, spherical cap) are implemented and compared. The passivation of the front surface could be improved substantially by the introduction of an Al 2 O 3 layer deposited via atomic layer deposition under the classical antireflection coating SiN X . The impact of the addition of the Al 2 O 3 layer on the contact resistance cannot be neglected and becomes significant for thicknesses higher than 4 nm. Multicrystalline silicon (mc-Si) PERC solar cells are fabricated and measured, leading to a maximum efficiency of about 18.6% for the acidic texture, and for both posts-processed dry chemical etching (ADE) textures. No current gain for the ADE textured wafer compared to the acidic texture could be observed on cell level due to an inhomogeneous etching. However, a gain of 0.4 mA/cm 2 for the ADE texture was calculated from local EQE measurements. ADE texture presents therefore 2 advantages: compatibility to diamond wire sawing and a potential current gain for PERC solar cell structure. |
| Databáze: | OpenAIRE |
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