Particle formation paths in the synthesis of silicon nitride powder in a laser-heated aerosol reactor

Autor:	Frank Einar Kruis, Brian Scarlett, Jan C. M. Marijnissen, Wim Oostra, Joop Schoonman
Rok vydání:	1998
Předmět:	Materials science Precipitation (chemistry) Inorganic chemistry Thermal decomposition Sintering Laminar flow Aerosol chemistry.chemical_compound Silicon nitride chemistry Chemical engineering Materials Chemistry Ceramics and Composites Particle Stoichiometry Elektrotechnik
Zdroj:	Journal of the European Ceramic Society. 18:1025-1036
ISSN:	0955-2219
DOI:	10.1016/s0955-2219(98)00006-5
Popis:	The Laser-chemical vapour precipitation of Si 3 N 4 powder by reacting SiH 4 and NH 3 was studied using a newly developed laminar gas mixing system. Thermophoretic sampling enabled monitoring of the formation process on a milli-second basis and shows the existence of two synthesis paths: the nitridation of Si particles and the sintering of directly formed Si 3 N 4 . The latter route leads to almost stoichiometric α- and β-Si 3 N 4 , with particle sizes up to 150 nm. The Si 3 N 4 particles do not decompose above the thermodynamic decomposition temperature, probably due to kinetic reasons since the residence time is of the order of milliseconds.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1c752295a8e5b6261091b2b0c593a2dd https://doi.org/10.1016/s0955-2219(98)00006-5 Zobrazit plný text záznamu Full Text from ScienceDirect