Soft x-ray laser beamline for surface processing and damage studies
| Autor: | Yuji Hosaka, Thanh-Hung Dinh, Takeshi Higashiguchi, Masakazu Washio, Kazuyuki Sakaue, Noboru Hasegawa, Masaharu Nishikino, Yasunari Maekawa, Satoshi Ichimaru, Masahiko Ishino, Hiroki Yamamoto, Akira Sasaki, Tadashi Hatano, Masatoshi Hatayama, Kimio Yoshimura |
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| Rok vydání: | 2020 |
| Předmět: |
Materials science
business.industry X-ray optics Curved mirror Laser 01 natural sciences Fluence Atomic and Molecular Physics and Optics law.invention 010309 optics Optics Beamline law 0103 physical sciences Transmittance Electrical and Electronic Engineering business Engineering (miscellaneous) Beam (structure) Beam splitter |
| Zdroj: | Applied optics. 59(12) |
| ISSN: | 1539-4522 |
| Popis: | We have developed a soft x-ray laser (SXRL) beamline equipped with an intensity monitor dedicated to ablation study such as surface processing and damage formation. The SXRL beam having a wavelength of 13.9 nm, pulse width of 7 ps, and pulse energy of around 200 nJ is generated from Ag plasma mediums using an oscillator-amplifier configuration. The SXRL beam is focused onto the sample surface by the Mo/Si multilayer coated spherical mirror. To get the correct irradiation energy/fluence, an intensity monitor composed of a Mo/Si multilayer beam splitter and an x-ray charge-coupled device camera has been installed in the beamline. The Mo/Si multilayer beam splitter has a large polarization dependence in the reflectivity around the incident angle of 45°. However, by evaluating the relationship between reflectivity and transmittance of the beam splitter appropriately, the irradiation energy onto the sample surface can be derived from the energy acquired by the intensity monitor. This SXRL beamline is available to not only the ablation phenomena but also the performance evaluation of soft x-ray optics and resists. |
| Databáze: | OpenAIRE |
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