Improved critical temperature of superconducting plasma-enhanced atomic layer deposition of niobium nitride thin films by thermal annealing

Autor: Francois Weiss, Victor Marchetto, G. Berthomé, Frédéric Mercier, Arnaud Mantoux, Ivane Bottala-Gambetta, Roman Reboud, Laetitia Rapenne, Alexandre Crisci, A. Sulpice, Manoel Jacquemin, Carmen Jiménez, Liang Tian, Elisabeth Blanquet
Přispěvatelé: Science et Ingénierie des Matériaux et Procédés (SIMaP), Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP ), Université Grenoble Alpes (UGA), Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP ), Magnétisme et Supraconductivité (MagSup), Institut Néel (NEEL), Université Grenoble Alpes (UGA)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP ), Laboratoire des matériaux et du génie physique (LMGP ), Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP ), Université Grenoble Alpes (UGA)-Université Grenoble Alpes (UGA), Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2020-....] (UGA [2020-....])-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP ), Université Grenoble Alpes [2020-....] (UGA [2020-....]), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP ), Université Grenoble Alpes [2020-....] (UGA [2020-....])-Université Grenoble Alpes [2020-....] (UGA [2020-....])-Centre National de la Recherche Scientifique (CNRS)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP ), Université Grenoble Alpes [2020-....] (UGA [2020-....])-Université Grenoble Alpes [2020-....] (UGA [2020-....])-Centre National de la Recherche Scientifique (CNRS), Institut National Polytechnique de Grenoble (INPG)-Centre National de la Recherche Scientifique (CNRS)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP ), Université Grenoble Alpes [2020-....] (UGA [2020-....])-Université Grenoble Alpes [2020-....] (UGA [2020-....]), Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2020-....] (UGA [2020-....])-Institut polytechnique de Grenoble - Grenoble Institute of Technology [2020-....] (Grenoble INP [2020-....]), Institut polytechnique de Grenoble - Grenoble Institute of Technology [2020-....] (Grenoble INP [2020-....]), Université Grenoble Alpes [2020-....] (UGA [2020-....])-Université Grenoble Alpes [2020-....] (UGA [2020-....])-Centre National de la Recherche Scientifique (CNRS)-Institut polytechnique de Grenoble - Grenoble Institute of Technology [2020-....] (Grenoble INP [2020-....]), Laboratoire des matériaux et du génie physique [2020-....] (LMGP [2020-....]), Institut National Polytechnique de Grenoble (INPG)-Centre National de la Recherche Scientifique (CNRS)-Institut polytechnique de Grenoble - Grenoble Institute of Technology [2020-....] (Grenoble INP [2020-....])
Jazyk: angličtina
Rok vydání: 2020
Předmět:
Materials science
Niobium nitride
Annealing (metallurgy)
Niobium
chemistry.chemical_element
02 engineering and technology
Thermal treatment
[CHIM.INOR]Chemical Sciences/Inorganic chemistry
01 natural sciences
[SPI]Engineering Sciences [physics]
Atomic layer deposition
chemistry.chemical_compound
[CHIM.GENI]Chemical Sciences/Chemical engineering
Condensed Matter::Superconductivity
0103 physical sciences
Materials Chemistry
Thin film
Composite material
[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
ComputingMilieux_MISCELLANEOUS
010302 applied physics
Superconductivity
Superconducting radio frequency
Metals and Alloys
Surfaces and Interfaces
[CHIM.MATE]Chemical Sciences/Material chemistry
021001 nanoscience & nanotechnology
Surfaces
Coatings and Films
Electronic
Optical and Magnetic Materials
chemistry
13. Climate action
0210 nano-technology
Zdroj: Thin Solid Films
Thin Solid Films, Elsevier, 2020, 709, pp.138232. ⟨10.1016/j.tsf.2020.138232⟩
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2020.138232⟩
Popis: The efficiency of the superconducting radio frequency cavities composed of Nb required the deposition of thickness-controlled multilayer coatings of superconductor-insulator-superconductor (S-I-S) on the internal surfaces of the cavities. Herein, we report the plasma-enhanced atomic layer deposition of carbon-free NbN (50 µm thick), followed by a thermal treatment, to obtain the superconducting layer in the S-I-S structure. Using (tert-butylimido)-tris(diethylamino)-niobium as the niobium precursor and H2 and NH3 plasma as reactive gasses, the deposition and annealing parameters were optimized by studying their effects on the film properties (crystallinity, density, and composition). We demonstrated that the superconducting critical temperature (Tc) can be improved after thermal annealing up to 13.8 K, a value compatible with the targeted application. In addition to the expected densified layers and increased grain size, we observed a partial transformation of the oxide present in the as-deposited layer into niobium oxynitride, which could indicate the origin of the improvement of the superconducting properties. With low carbon and oxygen impurity concentrations in the films, this study contributes to the understanding of the relationship between the structure, composition, and superconductivity in NbN.
Databáze: OpenAIRE
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