Low-noise Kerr frequency comb generation with low temperature deuterated silicon nitride waveguides

Autor:	Zeru Wu, Siyuan Yu, Yujie Chen, Yanfeng Zhang, Yaozu Xie, Shihao Zeng, Jiaqi Li
Rok vydání:	2021
Předmět:	Materials science business.industry Soliton (optics) Chemical vapor deposition Atomic and Molecular Physics and Optics Frequency comb chemistry.chemical_compound Resonator Atomic layer deposition Optics Silicon nitride chemistry Plasma-enhanced chemical vapor deposition Photonics business
Zdroj:	Optics Express. 29:29557
ISSN:	1094-4087
DOI:	10.1364/oe.438436
Popis:	We report very low-loss deuterated silicon nitride (SiNx:D) micro-ring resonators fabricated by back-end CMOS compatible low-temperature plasma-enhanced chemical vapor deposition (PECVD) without annealing. Strong confinement micro-ring resonators with a quality factor of > 2 million are achieved, corresponding to a propagation loss in the 1460-1610 nm wavelength range of ∼ 0.17 dB/cm. We further report the generation of low-noise coherent Kerr microcomb states including different perfect soliton crystals (PSC) in PECVD SiNx:D micro-ring resonators. These results manifest the promising potential of the back-end CMOS compatible SiNx:D platform for linear and nonlinear photonic circuits that can be co-integrated with electronics.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1af90eca8f325a3e6837ac734b31d8cc https://doi.org/10.1364/oe.438436 Zobrazit plný text záznamu