Parratt-Based and Model-Independent X-ray Reflectivity Fitting Procedure for Nanoscale Thin Film Characterization

Autor:	Chung-Jong Yu, Jaeyong Kim, Euikwoun Kim
Rok vydání:	2011
Předmět:	Work (thermodynamics) Electron density Materials science Series (mathematics) Biomedical Engineering Bioengineering General Chemistry Condensed Matter Physics Characterization (materials science) Computational physics X-ray reflectivity Slab General Materials Science Thin film Born approximation
Zdroj:	Journal of Nanoscience and Nanotechnology. 11:4624-4628
ISSN:	1533-4899 1533-4880
DOI:	10.1166/jnn.2011.3689
Popis:	A general-purpose fitting procedure is presented for X-ray reflectivity data. The Parratt formula was used to fit the low-angle region of the reflectivity data and the resulting electron density profile (continuous base EDP or cbEDP) was then divided into a series of electron density slabs of width 1 angstroms (discrete base EDP or dbEDP), which is then easily incorporated into the Distorted Wave Born Approximation (DWBA). An additional series of density slabs of resolution-limited width are overlapped to the dbEDP, and the density value of the each additional slab is allowed to vary to further fit the data model-independently using DWBA. Because this procedure combines the Parratt formula and the model-independent DWBA fitting, each fitting method can always be employed depending on the type of thin film. Moreover, it provides a way to overcome the difficulties when both fitting methods do not work well for certain types of thin films. Simulations show that this procedure is suitable for nanoscale thin film characterization.
Databáze:	OpenAIRE
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