Application of the Helium Ion Microscope as a SculptingTool for Nanosamples
| Autor: | Maria Rudneva, Diederik Maas, Henny W. Zandbergen, Sairam K. Malladi, Emile van Veldhoven |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2012 |
| Předmět: |
Nanostructure
Materials science genetic structures NI - Nano Instrumentation chemistry.chemical_element Nanotechnology High Tech Systems & Materials 02 engineering and technology Electron 01 natural sciences Microbiology Wedge (geometry) Ion beam processing Physics & Electronics 0103 physical sciences Sample preparation Helium 010302 applied physics TS - Technical Sciences Industrial Innovation business.industry Physics 021001 nanoscience & nanotechnology chemistry Thin metal Optoelectronics 0210 nano-technology business Field ion microscope |
| Zdroj: | MRS Proceedings 2012 MRS Spring Meeting, 9-13 April 2012, San Francisco, CA, USA, 1455, 61-72 |
| DOI: | 10.1557/opl.2012.1347 |
| Popis: | In this paper we propose a few helium ion microscope (HIM)-based methods for sample preparation and modification. In particular we report the use of the HIM to make thin wedge SrTiO3 samples without significant artifacts, the possibility to reshape thin metal lines on an electron transparent membrane and the new method of HIM sample preparation by in situ heating of the samples during He-beam illumination. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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