X-ray pushing of a mechanical microswing
| Autor: | Joël Chevrier, R. Felici, Wilfrid Schwartz, O. Dhez, Geoffroy Auvert, Alessandro Siria, T. H. Metzger, O. Bikondoa, S. Le Denmat, N. Rochat, G. Torricelli, F. Comin, Didier Wermeille, Mário Rodrigues |
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| Rok vydání: | 2011 |
| Předmět: |
Microelectromechanical systems
Nanoelectromechanical systems Physics - Instrumentation and Detectors business.industry Mechanical Engineering FOS: Physical sciences Bioengineering General Chemistry Microbeam Instrumentation and Detectors (physics.ins-det) Thermal expansion Chopper Mechanics of Materials Optoelectronics General Materials Science Electrical and Electronic Engineering Absorption (electromagnetic radiation) business Nanoscopic scale Beam (structure) |
| Zdroj: | Nanotechnology. 19(44) |
| ISSN: | 0957-4484 |
| Popis: | Nanoelectromechanical Systems (NEMS) are among the best candidates to measure interactions at nanoscale [1-6], especially when resonating oscillators are used with high quality factor [7, 8]. Despite many efforts [9, 10], efficient and easy actuation in NEMS remains an issue [11]. The mechanism that we propose, thermally mediated Center Of Mass (COM) displacements, represents a new actuation scheme for NEMS and MEMS. To demonstrate this scheme efficiency we show how mechanical nanodis- placements of a MEMS is triggered using modulated X-ray microbeams. The MEMS is a microswing constituted by a Ge microcrystal attached to a Si microcantilever. The interaction is mediated by the Ge absorption of the intensity modulated X-ray microbeam impinging on the microcrystal. The small but finite thermal expansion of the Ge microcrystal is large enough to force a nanodisplacement of the Ge microcrystal COM glued on a Si microlever. The inverse mechanism can be envisaged: MEMS can be used to shape X-ray beams. A Si microlever can be a high frequency X-ray beam chopper for time studies in biology and chemistry. 5 pages, 4 figure |
| Databáze: | OpenAIRE |
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