Grating-Coupled Plasmonic Sensor for Sucrose Sensing Fabricated Using Optical Fiber-Based Interference Lithography (OFIL) System
| Autor: | Jian Yi Pae, Pankaj K. Sahoo, Murukeshan Vadakke Matham |
|---|---|
| Přispěvatelé: | School of Mechanical and Aerospace Engineering, Centre for Optical and Laser Engineering, Singapore Centre for 3D Printing |
| Rok vydání: | 2019 |
| Předmět: |
Materials science
Fabrication Optical fiber business.industry Electrical and electronic engineering::Optics optoelectronics photonics [Engineering] 010401 analytical chemistry Ranging Grating 01 natural sciences 0104 chemical sciences Interference lithography law.invention Interference (communication) law Optoelectronics Wafer Electrical and Electronic Engineering business Gratings Instrumentation Interference Lithography Plasmon |
| Zdroj: | IEEE Sensors Journal. 19:10477-10481 |
| ISSN: | 2379-9153 1530-437X |
| DOI: | 10.1109/jsen.2019.2933668 |
| Popis: | A grating-coupled plasmonic sensor for sucrose sensing was fabricated and experimentally validated in the spectral interrogation mode. The grating structures were fabricated on a silicon wafer using an optical fiber-based interference lithography (OFIL) system. The system can be easily reconfigured to write 1D grating features with a periodicity ranging from 514 nm to 1,646 nm. The patterned area can also be controlled from 5 mm down to 0.6 mm for energy efficient, device scale fabrication. The results demonstrated the potential of using the OFIL system as a highly versatile and low-cost method to fabricate grating-coupled plasmonic sensors for healthcare applications. NRF (Natl Research Foundation, S’pore) MOE (Min. of Education, S’pore) EDB (Economic Devt. Board, S’pore) Accepted version |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|