Memory effects in MOS capacitors with silicon quantum dots
| Autor: | Barbara Fazio, Salvatore Lombardo, Yougui Liao, Cosimo Gerardi, Isodiana Crupi, M. Vulpio, Corrado Bongiorno, M. Melanotte, Corrado Spinella |
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| Přispěvatelé: | Crupi, I., Lombardo, S., Spinella, C., Gerardi, C., Fazio, B., Vulpio, M., Melanotte, M., Liao, Y., Bongiorno, C. |
| Jazyk: | angličtina |
| Rok vydání: | 2001 |
| Předmět: |
Materials science
SRO Oxide Bioengineering Insulator (electricity) Chemical vapor deposition engineering.material Settore ING-INF/01 - Elettronica law.invention Biomaterials chemistry.chemical_compound law Thin film Nanocrystal memory business.industry Silicon-rich oxide Amorphous solid Capacitor Polycrystalline silicon chemistry Mechanics of Materials Transmission electron microscopy Single electron memory engineering Optoelectronics business |
| Zdroj: | Materials science & engineering. C, Biomimetic materials, sensors and systems 15 (2001): 283–285. doi:10.1016/S0928-4931(01)00220-X info:cnr-pdr/source/autori:Crupi I, Lombardo S, Spinella C, Gerardi C, Fazio B, Vulpio M, Melanotte M, Liao Y, Bongiorno C/titolo:Memory effects in MOS capacitors with silicon quantum dots/doi:10.1016%2FS0928-4931(01)00220-X/rivista:Materials science & engineering. C, Biomimetic materials, sensors and systems (Print)/anno:2001/pagina_da:283/pagina_a:285/intervallo_pagine:283–285/volume:15 |
| Popis: | To form crystalline Si dots embedded in SiO2, we have deposited thin films of silicon-rich oxide (SRO) by plasma-enhanced chemical vapor deposition of SiH4 and O2. Then the materials have been annealed in N2 ambient at temperatures between 950°C and 1100°C. Under such processing, the supersaturation of Si in the amorphous SRO film produces the formation of crystalline Si dots embedded in SiO2. The narrow dot size distributions, analyzed by transmission electron microscopy, are characterized by average grain radii and standard deviations down to about 1 nm. The memory functions of such structures has been investigated in MOS capacitors with a SRO film sandwiched between two thin SiO2 layers as insulator and with an n+ polycrystalline silicon gate. The operations of write and storage are clearly detected by measurements of hysteresis in capacitance-voltage characteristics. A model which explains both the occurence of steady-state conduction through the SiO2/SRO/SiO2 stack at a relatively low voltage and the shift of flat-band voltage is presented and discussed. © 2001 Elsevier Science B.V. All rights reserved. |
| Databáze: | OpenAIRE |
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