Use of a CNT-coated Piezoelectric Cantilever with Double Transduction As a Gas Sensor for Benzene Detection at Room Temperature
Autor: | Pierrick Clément, Eduard Llobet, Hélène Debéda, Claude Lucat |
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Přispěvatelé: | Dufour, Isabelle |
Rok vydání: | 2014 |
Předmět: |
Work (thermodynamics)
Cantilever Materials science chemical gas sensor [SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics Nanotechnology Carbon nanotube Conductivity piezoelectric cantilever law.invention chemistry.chemical_compound benzene law Relative humidity Benzene 31-longitudinal mode Engineering(all) CNTs business.industry General Medicine chemistry Electrode double transduction Optoelectronics business Layer (electronics) |
Zdroj: | Procedia Engineering. 87:708-711 |
ISSN: | 1877-7058 |
DOI: | 10.1016/j.proeng.2014.11.636 |
Popis: | In this work, we propose to use a screen-printed piezoelectric cantilever with double transduction. Indeed, the piezoelectric cantilever is used as a resonant type sensor coated with carbon nanotubes (CNTs) as sensitive layer. Then, the resistance of CNTs is measured in static mode in parallel thanks to a modification of the cantilever top electrode. The combination of the CNTs equilibrium conductivity measurement and the resonance frequency shift of the 31-longitudinal mode allows the use of this device as a chemical gas sensor for benzene detection. The responses towards benzene concentrations under different relative humidity backgrounds are discussed. |
Databáze: | OpenAIRE |
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