Carbon/titanium multilayers as soft-x-ray mirrors for the water window
| Autor: | Oliver Wehmeyer, Frank Hamelmann, H.J. Stock, Peter Bulicke, Ulrich Heinzmann, Gerhard Ulm, Ulf Kleineberg, Detlef Menke, Gabriele Haindl, Detlev Fuchs |
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| Rok vydání: | 1998 |
| Předmět: |
Water window
Materials science Ion beam business.industry Materials Science (miscellaneous) chemistry.chemical_element Fresnel equations Evaporation (deposition) Industrial and Manufacturing Engineering Ion Wavelength Optics chemistry Angle of incidence (optics) Business and International Management business Titanium |
| Zdroj: | Applied Optics. 37:6002 |
| ISSN: | 1539-4522 0003-6935 |
| DOI: | 10.1364/ao.37.006002 |
| Popis: | C/Ti multilayers with a period thickness of 2.1-2.7 nm were produced by electron-beam evaporation in ultrahigh vacuum as soft-x-ray mirrors in the water window (lambda = 2.3-4.4 nm). For smoothing the individual interfaces and thus enhancing the total reflectance, each layer was ion polished with an Art ion beam after deposition. For a multilayer of 85 bilayers, a reflectance of approximately 11% at an angle of incidence of 59 degrees (with respect to the surface normal) by use of s-polarized radiation at a wavelength of 2.77 nm was achieved. (C) 1998 Optical Society of America. |
| Databáze: | OpenAIRE |
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