Nanochannel arrays etched into hexagonal boron nitride meso-membranes by a focused ion beam
| Autor: | S. Linas, B. Poinsot, Arnaud Brioude, F. Cauwet, Rémy Fulcrand |
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| Přispěvatelé: | Laboratoire des Multimatériaux et Interfaces (LMI), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Institut Lumière Matière [Villeurbanne] (ILM), Université de Lyon-Université de Lyon-Centre National de la Recherche Scientifique (CNRS) |
| Rok vydání: | 2015 |
| Předmět: |
Materials science
General Chemical Engineering Hexagonal boron nitride Nanotechnology [CHIM.MATE]Chemical Sciences/Material chemistry General Chemistry Chemical vapor deposition [CHIM.INOR]Chemical Sciences/Inorganic chemistry Focused ion beam [SPI.MAT]Engineering Sciences [physics]/Materials law.invention symbols.namesake Membrane law [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] symbols [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics Electron microscope Raman spectroscopy ComputingMilieux_MISCELLANEOUS |
| Zdroj: | RSC Advances RSC Advances, Royal Society of Chemistry, 2015, 5 (61), pp.49231-49234. ⟨10.1039/c5ra05325k⟩ |
| ISSN: | 2046-2069 |
| Popis: | Meso-membranes with highly ordered nanochannel arrays have been fabricated by patterning hexagonal boron nitride (h-BN) films using a focused ion beam. The complete experimental procedure is given in detail from the chemical vapor deposition for h-BN synthesis to its patterning and the final membrane design for nanofluidic experiments. The membranes obtained are characterized at each experimental step by electron microscopy and Raman spectroscopy. The technique is finally applied to fabricate devices in which the only passage for a fluid is a nanochannel array etched into a h-BN film. |
| Databáze: | OpenAIRE |
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