Nanocharacterization of titanium nitride thin films obtained by reactive magnetron sputtering

Autor:	Nanostruc2014 Conference, MERIE, Violeta
Rok vydání:	2014
DOI:	10.6084/m9.figshare.1094067
Popis:	Nanocharacterization of titanium nitride thin films obtained by reactive magnetron sputtering
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::16a7e0f0d7ea9c9ff5e96cb26428382c Zobrazit plný text záznamu