Contact degradation due to material transfer in MEM switches
| Autor: | Nelly Bonifaci, F. Souchon, Olivier Lesaint, P.-L. Charvet, Alexis Peschot, Christophe Poulain |
|---|---|
| Přispěvatelé: | Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Laboratoire de Génie Electrique de Grenoble (G2ELab), Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Institut Polytechnique de Grenoble - Grenoble Institute of Technology-Centre National de la Recherche Scientifique (CNRS) |
| Jazyk: | angličtina |
| Rok vydání: | 2012 |
| Předmět: |
Materials science
02 engineering and technology 01 natural sciences Reliability (semiconductor) 0103 physical sciences Electronic engineering Electrical and Electronic Engineering Contact failure Safety Risk Reliability and Quality ComputingMilieux_MISCELLANEOUS 010302 applied physics Microelectromechanical systems business.industry Atomic force microscopy [SPI.NRJ]Engineering Sciences [physics]/Electric power 021001 nanoscience & nanotechnology Condensed Matter Physics Atomic and Molecular Physics and Optics Electrical contacts Surfaces Coatings and Films Electronic Optical and Magnetic Materials Optoelectronics 0210 nano-technology business Material transfer Voltage Degradation (telecommunications) |
| Zdroj: | Microelectronics Reliability Microelectronics Reliability, 2012, 52, pp.2261-2266 Microelectronics Reliability, Elsevier, 2012, 52, pp.2261-2266 |
| ISSN: | 0026-2714 |
| Popis: | The reliability of electrical contacts is now the major challenge to improve the lifetime of Micro Electro Mechanical Switches. This paper investigates contact failure due to material transfer in real MEMS devices. The mechanisms of degradation observed on components have been reproduced with a good correlation on an AFM-based setup. Therefore, the importance of the closure phase and the voltage applied across the contact on the material transfer phenomenon has been highlighted with a fine quantitative analysis of the transferred volume. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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