Profilometry by phase-shifted Talbot images

Autor: R. G. Dorsch, Bozenko F. Oreb
Rok vydání: 1994
Předmět:
Zdroj: Applied Optics. 33:7955
ISSN: 1539-4522
0003-6935
DOI: 10.1364/ao.33.007955
Popis: We introduce a profilometry sensor that combines phase shifting with a Talbot self-image of a sinusoidal grating as the illumination part of the sensor. Contrast of the Talbot diffraction pattern produced with a sinusoidal grating in a diverging beam is theoretically discussed and verified experimentally. The mathematical relationship that is used to convert the phase measured with this sensor to the corresponding relief of an object is derived in the Appendix. A ceramic former used in the production of lenses was profiled with this sensor, and measurement results are presented.
Databáze: OpenAIRE