Young's modulus of thin SmS films measured by nanoindentation and laser acoustic wave
| Autor: | Dirk Poelman, Mark Gee, F. De Luca, Ivan Rungger, Mark Stewart, Andreas Sousanis, Philippe Smet, Hannah Zhang |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2021 |
| Předmět: |
HARDNESS
Materials science Young's modulus 02 engineering and technology 01 natural sciences Nanoindentation symbols.namesake SUBSTRATE Indentation 0103 physical sciences Materials Chemistry Surface roughness Thin film Composite material Elastic modulus 010302 applied physics ELASTIC-MODULUS LAwave INDENTATION Surface acoustic wave Surfaces and Interfaces General Chemistry MECHANICAL-PROPERTIES 021001 nanoscience & nanotechnology Condensed Matter Physics Piezoresistive effect Surfaces Coatings and Films Physics and Astronomy symbols 0210 nano-technology Samarium sulphide |
| Zdroj: | SURFACE & COATINGS TECHNOLOGY |
| ISSN: | 0257-8972 1879-3347 |
| Popis: | High quality phase pure samarium sulphide (SmS) thin films with low surface roughness were prepared by electron beam evaporation using a samarium metal source in an H2S atmosphere. SmS shows a strong piezoresistive response due to a phase transition between a semiconducting and metallic state, which can be employed in piezo-electronic devices and stress sensing. Measurement of fundamental mechanical properties such as Young's modulus is thus a major objective to assess the elastic behaviour of SmS under external stress. Nanoindentation was used to measure the elastic modulus of thin semiconducting films with nominal thickness of 100 nm, 200 nm and 400 nm on silicon substrate at different loads. The indentation results were fitted to a modified King's model to exclude the effect of the substrate, giving Young's moduli of the films in the range of 79–82 GPa, consistent with measurements with a Laser Surface Acoustic Wave system (LAwave) and results from literature. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full Text from ScienceDirect