Mechanical Properties of MEMS Switches: Modeling and Characterization
| Autor: | D. Levy, A. Koszewski, F. Souchon |
|---|---|
| Rok vydání: | 2009 |
| Předmět: |
Microelectromechanical systems
Materials science Series (mathematics) nanoindentation Chemistry(all) Measure (physics) Mechanical engineering Stiffness General Medicine Nanoindentation switch Characterization (materials science) Contact force MEMS stiffness medicine Chemical Engineering(all) mechanical medicine.symptom Ohmic contact |
| Zdroj: | Procedia Chemistry. 1(1):626-629 |
| ISSN: | 1876-6196 |
| DOI: | 10.1016/j.proche.2009.07.156 |
| Popis: | In this study, a nanoindentation technique is used to characterize the mechanical properties of RF MEMS series ohmic switches. We present the methodology, analytical models and test setup which allow to measure stiffness, gap heights and to evaluate contact forces. To validate this methodology, the nanoindentation of two types of RF MEMS switches, fabricated by CEA-LETI, is carried out. These data are fitted with an electro-mechanical model of the switch and are then compared with the results of electrical functional tests. |
| Databáze: | OpenAIRE |
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