Development of a Planarization Process for the Fabrication of Nanocrystalline Diamond Based Photonic Structures
| Autor: | Michael Kopnarski, Rolf Merz, Johann Peter Reithmaier, Julia Heupel, Cyril Popov, Nina Felgen |
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| Rok vydání: | 2019 |
| Předmět: |
Fabrication
Materials science business.industry Nanocrystalline diamond Nanotechnology Surfaces and Interfaces Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Chemical-mechanical planarization Scientific method Materials Chemistry Photonics Electrical and Electronic Engineering business |
| Zdroj: | physica status solidi (a). 216:1970072 |
| ISSN: | 1862-6319 1862-6300 |
| DOI: | 10.1002/pssa.201970072 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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