X-ray Full Field Microscopy at 30 keV
| Autor: | F Marschall, A Last, M Simon, M Kluge, V Nazmov, H Vogt, M Ogurreck, I Greving, J Mohr |
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| Jazyk: | angličtina |
| Rok vydání: | 2014 |
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| Zdroj: | Journal of physics / Conference Series 499, 012007 (2014). doi:10.1088/1742-6596/499/1/012007 22nd International Congress on X-Ray Optics and Microanalysis, Hamburg, Germany, 2016-09-02-2016-09-06 Journal of physics / Conference Series, 499 (1), Art.Nr.: 012007/1-6 Marschall, F.; Last, A.; Simon, M.; Kluge, M.; Nazmov, V.; Vogt, H.; Ogurreck, M.; Greving, I.; Mohr, J.: X-ray Full Field Microscopy at 30 keV. In: Journal of Physics: Conference Series . Vol. 499 (2014) 012007. (DOI: 10.1088/1742-6596/499/1/012007) |
| ISSN: | 1742-6596 1742-6588 |
| DOI: | 10.1088/1742-6596/499/1/012007 |
| Popis: | 22nd International Congress on X-Ray Optics and Microanalysis, Hamburg, Germany, 2 Sep 2016 - 6 Sep 2016; Journal of physics / Conference Series 499, 012007 (2014). doi:10.1088/1742-6596/499/1/012007 In our X-ray full field microscopy experiments, we demonstrated a resolution better than 260 nm over the entire field of view of 80 μm x 80 μm at 30 keV. Our experimental setup at PETRA III, P05, had a length of about 5 m consisting of an illumination optics, an imaging lens and a detector. For imaging, we used a compound refractive lens (CLR) consisting of mr-L negative photo resist, which was fabricated by deep X-ray lithography. As illumination optics, we choose a refractive rolled X-ray prism lens, which was adapted to the numerical aperture of the imaging lens. Published by IOP Publ., Bristol |
| Databáze: | OpenAIRE |
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