RZLINE code modelling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation
Autor: | Konstantin N. Koshelev, Vladimir V. Ivanov, Vladimir G. Novikov, Viacheslav Medvedev, Alexander S. Grushin, Vladimir M. Krivtsun |
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Přispěvatelé: | Faculty of Science and Technology, XUV Optics |
Jazyk: | angličtina |
Rok vydání: | 2012 |
Předmět: |
Physics
business.industry Mechanical Engineering Extreme ultraviolet lithography Energy conversion efficiency chemistry.chemical_element IR-100029 Plasma Radiation Condensed Matter Physics Laser Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials law.invention Optics chemistry METIS-298229 law Extreme ultraviolet Physics::Space Physics Electrical and Electronic Engineering business Tin Spectroscopy |
Zdroj: | Journal of micro/nanolithography, MEMS, and MOEMS, 11(2):021112. SPIE |
ISSN: | 1932-5150 |
Popis: | An integrated model is developed to describe the hydrodynamics, atomic, and radiation processes that take place in extreme ultraviolet (EUV) radiation sources based on a laser-produced plasma with a distributed tin target. The modeling was performed using the RZLINE code—a numerical code for the simulation of EUV emission by hot dense plasmas. The purpose of the simulation is to evaluate the spectral characteristics of the radiation source, conversion efficiency, source size, evaporation rate of the target, energetic, and space distribution of debris (nanoparticles, neutrals, and ions). The advantages of a distributed target in comparison with a single droplet target are also discussed. |
Databáze: | OpenAIRE |
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