RZLINE code modelling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation

Autor: Konstantin N. Koshelev, Vladimir V. Ivanov, Vladimir G. Novikov, Viacheslav Medvedev, Alexander S. Grushin, Vladimir M. Krivtsun
Přispěvatelé: Faculty of Science and Technology, XUV Optics
Jazyk: angličtina
Rok vydání: 2012
Předmět:
Zdroj: Journal of micro/nanolithography, MEMS, and MOEMS, 11(2):021112. SPIE
ISSN: 1932-5150
Popis: An integrated model is developed to describe the hydrodynamics, atomic, and radiation processes that take place in extreme ultraviolet (EUV) radiation sources based on a laser-produced plasma with a distributed tin target. The modeling was performed using the RZLINE code—a numerical code for the simulation of EUV emission by hot dense plasmas. The purpose of the simulation is to evaluate the spectral characteristics of the radiation source, conversion efficiency, source size, evaporation rate of the target, energetic, and space distribution of debris (nanoparticles, neutrals, and ions). The advantages of a distributed target in comparison with a single droplet target are also discussed.
Databáze: OpenAIRE