Fabrication of a Horizontal and a Vertical Large Surface Area Nanogap Electrochemical Sensor
| Autor: | Frank Marken, Jules L. Hammond, Siva Sivaraya, Mark C. Rosamond, Pedro Estrela |
|---|---|
| Přispěvatelé: | Ju, H |
| Jazyk: | angličtina |
| Rok vydání: | 2016 |
| Předmět: |
Fabrication
Materials science vertical coplanar Silicon Nanogap junctions capacitance chemistry.chemical_element Nanotechnology 02 engineering and technology Substrate (electronics) nanogap horizontal coplanar anodic bonding dielectric 010402 general chemistry lcsh:Chemical technology 01 natural sciences Biochemistry Article Analytical Chemistry lcsh:TP1-1185 Electrical and Electronic Engineering Reactive-ion etching Instrumentation Lithography 021001 nanoscience & nanotechnology Atomic and Molecular Physics and Optics Amperometry 0104 chemical sciences Electrochemical gas sensor Biosensors chemistry Electrode 0210 nano-technology |
| Zdroj: | Sensors (Basel, Switzerland) Hammond, J, Rosamond, M C, Sivaraya, S, Marken, F & Estrela, P 2016, ' Fabrication of a Horizontal and a Vertical Large Surface Area Nanogap Electrochemical Sensor ', Sensors, vol. 16, no. 12, 2128 . https://doi.org/10.3390/s16122128 Sensors, Vol 16, Iss 12, p 2128 (2016) Sensors; Volume 16; Issue 12; Pages: 2128 |
| ISSN: | 1424-8220 |
| Popis: | Nanogap sensors have a wide range of applications as they can provide accurate direct detection of biomolecules through impedimetric or amperometric signals. Signal response from nanogap sensors is dependent on both the electrode spacing and surface area. However, creating large surface area nanogap sensors presents several challenges during fabrication. We show two different approaches to achieve both horizontal and vertical coplanar nanogap geometries. In the first method we use electron-beam lithography (EBL) to pattern an 11 mm long serpentine nanogap (215 nm) between two electrodes. For the second method we use inductively-coupled plasma (ICP) reactive ion etching (RIE) to create a channel in a silicon substrate, optically pattern a buried 1.0 mm 1.5 mm electrode before anodically bonding a second identical electrode, patterned on glass, directly above. The devices have a wide range of applicability in different sensing techniques with the large area nanogaps presenting advantages over other devices of the same family. As a case study we explore the detection of peptide nucleic acid (PNA)DNA binding events using dielectric spectroscopy with the horizontal coplanar device. |
| Databáze: | OpenAIRE |
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