Linnik microscope imaging of integrated circuit structures

Autor:	M I Pether, J. C. Dainty, D M Gale
Rok vydání:	2010
Předmět:	Wavefront Microscope Materials science business.industry Materials Science (miscellaneous) Integrated circuit Industrial and Manufacturing Engineering Interference microscopy law.invention Interferometry Optics law Microscopy Profilometer Business and International Management business Waveguide
Zdroj:	Applied optics. 35(1)
ISSN:	1559-128X
Popis:	Experimental one-dimensional intensity and phase images of thick (>200 nm) oxide lines on silicon are presented together with profiles predicted from the waveguide model. Experimental results were obtained with a purpose-built Linnik interference microscope that makes use of phase-shifting interferometry for interferogram analysis. Profiles have been obtained for both TE and TM polarizations for a wide range of focal positions and in both bright-field [type 1(a)] scanning and confocal modes of microscope operation. The results show extremely good agreement despite several simplifying assumptions incorporated into the theoretical model to reduce computing times.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1351d13a92a2e6651a3a2510df6bcccf https://pubmed.ncbi.nlm.nih.gov/21068990 Zobrazit plný text záznamu