A miniaturized, high frequency mechanical scanner for high speed atomic force microscope using suspension on dynamically determined points
| Autor: | Dorus de Lange, Gert Witvoet, Bert Dekker, R.W. Herfst, Hamed Sadeghian, Will Crowcombe |
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| Rok vydání: | 2015 |
| Předmět: |
OM - Opto-Mechatronics
Scanner Microscope Materials science image scanners High Tech Systems & Materials position sensitive detectors Microscopy Atomic Force law.invention Optics law Miniaturization Electronics Z-scan technique Instrumentation TS - Technical Sciences Industrial Innovation atomic force microscopy business.industry Atomic force microscopy aluminium Bandwidth (signal processing) Mechatronics Mechanics & Materials atomic force microscopes business Actuator |
| Zdroj: | Review of Scientific Instruments, 86(11) Review of Scientific Instruments, 86 |
| ISSN: | 1089-7623 0034-6748 |
| Popis: | One of the major limitations in the speed of the atomic force microscope (AFM) is the bandwidth of the mechanical scanning stage, especially in the vertical (z) direction. According to the design principles of “light and stiff” and “static determinacy,” the bandwidth of the mechanical scanner is limited by the first eigenfrequency of the AFM head in case of tip scanning and by the sample stagein terms of sample scanning. Due to stringent requirements of the system, simply pushing the first eigenfrequency to an ever higher value has reached its limitation. We have developed a miniaturized, high speed AFM scanner in which the dynamics of the z-scanning stage are made insensitive to its surrounding dynamics via suspension of it on specific dynamically determined points. Thisresulted in a mechanical bandwidth as high as that of the z-actuator (50 kHz) while remaining insensitive to the dynamics of its base and surroundings. The scanner allows a practical z scan range of 2.1 µm. We have demonstrated the applicability of the scanner to the high speed scanning of nanostructures. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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