A Row-Column (RC) Addressed 2-D Capacitive Micromachined Ultrasonic Transducer (CMUT) Array on a Glass Substrate
| Autor: | Omer Oralkan, Oluwafemi J. Adelegan, Feysel Yalcin Yamaner, Jean L. Sanders, Ali Onder Biliroglu, Xun Wu |
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| Rok vydání: | 2021 |
| Předmět: |
Capacitive coupling
Frequency response Materials science Acoustics and Ultrasonics business.industry Capacitive sensing Biasing 01 natural sciences Signal Article Capacitive micromachined ultrasonic transducers Anodic bonding 0103 physical sciences Optoelectronics Ultrasonic sensor Electrical and Electronic Engineering business 010301 acoustics Instrumentation |
| Zdroj: | IEEE Trans Ultrason Ferroelectr Freq Control |
| ISSN: | 1525-8955 0885-3010 |
| DOI: | 10.1109/tuffc.2020.3014780 |
| Popis: | This article presents a row-column (RC) capacitive micromachined ultrasonic transducer (CMUT) array fabricated using anodic bonding on a borosilicate glass substrate. This is shown to reduce the bottom electrode-to-substrate capacitive coupling. This subsequently improves the relative response of the elements when top or bottom electrodes are used as the "signal" (active) electrode. This results in a more uniform performance for the two cases. Measured capacitance and resonant frequency, pulse-echo signal amplitude, and frequency response are presented to support this. Biasing configurations with varying ac and dc arrangements are applied and subsequently explored. Setting the net dc bias voltage across an off element to zero is found to be most effective to minimize spurious transmission. To achieve this, a custom switching circuit was designed and implemented. This circuit was also used to obtain orthogonal B-mode cross-sectional images of a rotationally asymmetric target. |
| Databáze: | OpenAIRE |
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