Residual Stress and Tribological Behavior of Hydrogen-Free Al-Dlc Films Prepared by Hipims Under Different Bias Voltages

Autor:	Chao-Qian Guo, Hai-Qing Li, Ya-Li Peng, Ming-Jiang Dai, Song-Sheng Lin, Chun-Bei Wei, Yi-Fan Su
Rok vydání:	2022
Předmět:	Materials Chemistry Surfaces and Interfaces General Chemistry Condensed Matter Physics Surfaces Coatings and Films
Zdroj:	SSRN Electronic Journal.
ISSN:	1556-5068
DOI:	10.2139/ssrn.4017322
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1121d7cbf5574a9e514ee7ce6287378d https://doi.org/10.2139/ssrn.4017322 Zobrazit plný text záznamu