X-ray diagnostics of the structure of nearsurface layers of ionimplanted monocrystalline materials
| Autor: | S. I. Yaremiy, I. P. Yaremiy, Anna Luсas, Olesia Vlasii, V. D. Fedoriv, Mariia Povkh |
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| Rok vydání: | 2018 |
| Předmět: |
Diffraction
Materials science defects of structure Energy Engineering and Power Technology 02 engineering and technology 01 natural sciences Industrial and Manufacturing Engineering Monocrystalline silicon Management of Technology and Innovation strain profile lcsh:Technology (General) 0103 physical sciences lcsh:Industry ion implantation Electrical and Electronic Engineering 010302 applied physics Scattering Applied Mathematics Mechanical Engineering statistical dynamic theory of x-ray scattering Molar absorptivity 021001 nanoscience & nanotechnology Computer Science Applications Computational physics Ion implantation x-ray diffraction Control and Systems Engineering X-ray crystallography lcsh:T1-995 lcsh:HD2321-4730.9 Deformation (engineering) 0210 nano-technology Intensity (heat transfer) |
| Zdroj: | Eastern-European Journal of Enterprise Technologies, Vol 6, Iss 12 (96), Pp 50-57 (2018) |
| ISSN: | 1729-4061 1729-3774 |
| DOI: | 10.15587/1729-4061.2018.151806 |
| Popis: | A method for obtaining information on the distribution of the parameters of a crystalline structure in the thickness of a near-surface ion-implanted layer, types and characteristics of radiation defects (size, concentration, etc.) has been developed. The influence of the main diffraction parameters on the rocking curve was established, which made it possible to develop an algorithm for the approximation of the theoretically calculated rocking curves to the experimental ones. It is shown that at small doses of implantation, the value of the extinction coefficient μ ds influences most significantly on the intensity of the rocking curves outside the additional oscillatory structure, and the value of the static Debye-Waller factor E influences most significantly on the intensity of the last oscillations of the additional oscillatory structure that correspond to the maximum deformation. To characterize a defective system, it is necessary to analyze the diffuse component using a part of the rocking curve, which is located behind an additional oscillatory structure and in which the contribution of the coherent component is minimal. The method is tested in the analysis of boron-implanted iron-yttrium garnet films. The presented approach provides an opportunity to obtain much of information about the structure of the ion-implanted layer, since it uses the statistical dynamic theory of X-ray scattering, which takes into account the defects of the crystalline structure of any type and size. Also, this approach makes it possible to use all the information contained in the rocking curves and to assess the degree of uniqueness of the specified parameters |
| Databáze: | OpenAIRE |
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