Microstructure of epitaxial Mg 3 N 2 thin films grown by MBE
| Autor: | Jesús Zúñiga-Pérez, H. Rotella, P. John, P. Vennéguès, Céline Lichtensteiger, Christiane Deparis |
|---|---|
| Přispěvatelé: | Centre National de la Recherche Scientifique (CNRS), Université Côte d'Azur (UCA), University of Geneva [Switzerland], Department of Quantum Matter Physics [Geneva] (DQMP) |
| Jazyk: | angličtina |
| Rok vydání: | 2021 |
| Předmět: |
010302 applied physics
Diffraction Materials science Condensed matter physics business.industry General Physics and Astronomy 02 engineering and technology Substrate (electronics) 021001 nanoscience & nanotechnology Microstructure Epitaxy 01 natural sciences Condensed Matter::Materials Science Semiconductor Transmission electron microscopy Condensed Matter::Superconductivity 0103 physical sciences [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] Thin film 0210 nano-technology business Molecular beam epitaxy |
| Zdroj: | Journal of Applied Physics Journal of Applied Physics, American Institute of Physics, 2021, 129 (9), pp.095303. ⟨10.1063/5.0041903⟩ |
| ISSN: | 0021-8979 1089-7550 |
| DOI: | 10.1063/5.0041903⟩ |
| Popis: | International audience; The epitaxial growth of Mg 3 N 2 thin films by molecular beam epitaxy has been recently achieved. This work presents the structural properties of the films, including grains sizes and lattice rotations, as assessed by x-ray diffraction and transmission electron microscopy. The films' microstructure consists of well-aligned columnar grains 10 nm in diameter that nucleate at the film/substrate interface and that display a significant column twist, in the order of 2.5°. As growth proceeds, tilted and twisted mosaic blocs overgrow these columns, as observed in to many other epitaxial semiconductors. Yet, the rocking curves on symmetric reflections display extremely narrow peaks (∼50 arcseconds), revealing a long-range spatial correlation between structural defects that should not be mistakenly considered as a proof of high crystalline quality. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|