Aiming for thresholdless semiconductor lasers: successful fabrication of 2-D photonic bandgap structures in GaAs/AlGaAs

Autor:	Stephen Thoms, C. D. W. Wilkinson, Y.P. Song, R.M. DelaRue, Thomas F. Krauss
Rok vydání:	2002
Předmět:	Materials science Fabrication business.industry Photonic integrated circuit Gallium arsenide Semiconductor laser theory chemistry.chemical_compound chemistry Optoelectronics Dry etching business Realization (systems) Lithography Photonic bandgap
Zdroj:	Scopus-Elsevier
Popis:	We report the first realization of two-dimensional photonic bandgap structures with a period of /spl lambda//sub 0//2n in the GaAs/AlGaAs material system. We discuss the lithography and dry etching issues that are important for a successful device implementation of these results.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::10ab39db7651041b33b5abbee2b5d3ee https://doi.org/10.1109/leos.1994.586631 Zobrazit plný text záznamu