Ceramic microhotplates for low power metal oxide gas sensors
| Autor: | Mykola Vinnichenko, Marco Fritsch, Mihails Kusnezoff, Sindy Mosch, Nikolai Trofimenko, Konstantin Oblov, Lena Wissmeier, Anastasiya Gorshkova, Franz-Marin Fuchs, Nikolay Samotaev |
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| Přispěvatelé: | Publica |
| Jazyk: | angličtina |
| Rok vydání: | 2020 |
| Předmět: |
Hydrogen
Oxide chemistry.chemical_element 02 engineering and technology ceramics 01 natural sciences Methane chemistry.chemical_compound 0103 physical sciences Ceramic Laser Technology and Physics Process engineering MOX fuel metal oxide gas sensor 010302 applied physics Microelectromechanical systems business.industry 021001 nanoscience & nanotechnology Substrate (building) MEMS chemistry inkjet printing technology visual_art visual_art.visual_art_medium Environmental science 0210 nano-technology business Carbon monoxide |
| Popis: | The progress of the Internet of Things stimulates the development of sensors of small size and low power consumption. Miniaturized metal-oxide semiconductor (MOX) gas sensors (e.g. methane, hydrogen or carbon monoxide detection) can be integrated into agro-industrial facilities such as livestock facilities, fish farming, forestry, food-storage and horticulture, where they support future-oriented plant production (smart agriculture). The central part of a MOX gas sensor is a micro-hotplate, which is mainly responsible for the sensor power consumption at operating temperatures from 450 °C to 600 °C. Under harsh environmental conductions, ceramic materials are the best choice for the micro-hotplate substrate and sensor housing (ceramic MEMS) in combination with platinum metallization for the heater. To realize such gas sensors with low power consumption ( |
| Databáze: | OpenAIRE |
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