X-ray Imaging of Functional Three-Dimensional Nanostructures on Massive Substrates
| Autor: | Ad Lagendijk, Willem L. Vos, Diana Grishina, Alexandra Pacureanu, D. Devashish, Cornelis A.M. Harteveld, Peter Cloetens |
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| Přispěvatelé: | Complex Photonic Systems |
| Rok vydání: | 2019 |
| Předmět: |
Materials science
UT-Hybrid-D Holography Nanophotonics General Physics and Astronomy 02 engineering and technology 010402 general chemistry 01 natural sciences Article law.invention law General Materials Science Penetration depth 3D integration photonic band gaps Photonic crystal Silicon photonics silicon photonics business.industry X-ray imaging General Engineering 021001 nanoscience & nanotechnology Synchrotron 0104 chemical sciences Nanolithography complementary metal-oxide semiconductor nanofabrication Optoelectronics Photonics 0210 nano-technology business |
| Zdroj: | ACS nano, 13(12), 13932-13939. American Chemical Society ACS Nano |
| ISSN: | 1936-086X 1936-0851 |
| Popis: | To investigate the performance of three-dimensional (3D) nanostructures, it is vital to study their internal structure with a methodology that keeps the device fully functional and ready for further integration. To this aim, we introduce here traceless X-ray tomography (TXT) that combines synchrotron X-ray holographic tomography with high X-ray photon energies (17 keV) in order to study nanostructures "as is" on massive silicon substrates. The combined strengths of TXT are a large total sample size to field-of-view ratio and a large penetration depth. We study exemplary 3D photonic band gap crystals made by CMOS-compatible means and obtain real space 3D density distributions with 55 nm spatial resolution. TXT identifies why nanostructures that look similar in electron microscopy have vastly different nanophotonic functionality: one "good" crystal with a broad photonic gap reveals 3D periodicity as designed; a second "bad" structure without a gap reveals a buried void, and a third "ugly" one without gap is shallow due to fabrication errors. Thus, TXT serves to nondestructively differentiate between the possible reasons of not finding the designed and expected performance and is therefore a powerful tool to critically assess 3D functional nanostructures. |
| Databáze: | OpenAIRE |
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