Décharges plasma radiofréquences capacitivement couplées dans N2-H2 à basse pression. Partie II. Résultats de modélisation : l’importance des interactions plasma-surface

Autor: Audrey Chatain, Luís L Alves, Nathalie Carrasco, Luis Marques, Miguel Jiménez-Redondo, Olivier Guaitella, Guy Cernogora
Přispěvatelé: Universidade do Minho, Fundação para a Ciência e a Tecnologia (Portugal), European Commission, Université Paris-Saclay, Instituto de Estructura de la Materia (IEM), Consejo Superior de Investigaciones Científicas [Madrid] (CSIC), PLANETO - LATMOS, Laboratoire Atmosphères, Milieux, Observations Spatiales (LATMOS), Sorbonne Université (SU)-Université de Versailles Saint-Quentin-en-Yvelines (UVSQ)-Centre National de la Recherche Scientifique (CNRS)-Institut national des sciences de l'Univers (INSU - CNRS)-Sorbonne Université (SU)-Université de Versailles Saint-Quentin-en-Yvelines (UVSQ)-Centre National de la Recherche Scientifique (CNRS)-Institut national des sciences de l'Univers (INSU - CNRS), Laboratoire de Physique des Plasmas (LPP), Observatoire de Paris, Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-École polytechnique (X)-Sorbonne Université (SU)-Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS), Instituto de Plasmas e Fusão Nuclear [Lisboa] (IPFN), Instituto Superior Técnico, Universidade Técnica de Lisboa (IST), Departamento de Fisica [Braga]
Jazyk: angličtina
Rok vydání: 2020
Předmět:
Zdroj: Digital.CSIC. Repositorio Institucional del CSIC
instname
Plasma Sources Science and Technology
Repositório Científico de Acesso Aberto de Portugal
Repositório Científico de Acesso Aberto de Portugal (RCAAP)
instacron:RCAAP
Plasma Sources Science and Technology, IOP Publishing, 2020, 29 (8), pp.085023. ⟨10.1088/1361-6595/ab9b1b⟩
ISSN: 0963-0252
1361-6595
0741-3335
0029-5515
0022-3727
0004-637X
0036-0244
1742-6596
0003-0503
0022-3700
0368-3508
DOI: 10.1088/1361-6595/ab9b1b⟩
Popis: 23 pags., 16 figs., 4 tabs.
In this work, we present the results of simulations carried out for N2 –H2 capacitively coupled radio-frequency discharges, running at low pressure (0.3–0.9 mbar), low power (5–20 W), and for amounts of H2 up to 5%. Simulations are performed using a hybrid code that couples a two-dimensional time-dependent fluid module, describing the dynamics of the charged particles in the discharge, to a zero-dimensional kinetic module, that solves the Boltzmann equation and describes the production and destruction of neutral species. The model accounts for the production of several vibrationally and electronic excited states, and contains a detailed surface chemistry that includes recombination processes and the production of NHx molecules. The results obtained highlight the relevance of the interactions between plasma and surface, given the role of the secondary electron emission in the electrical parameters of the discharge and the critical importance of the surface production of ammonia to the neutral and ionic chemistry of the discharge.
L Marques and M Jiménez-Redondo acknowledge the financial support of the Portuguese Foundation for Science and Technology (FCT) in the framework of the Strategic Funding UIDB/04650/2019 and project UTAPEXPL/NTec/0107/2017. L L Alves acknowledges the financial support of the Portuguese Foundation for Science and Technology (FCT) through project UID/FIS/50010/2019 and grant SFRH/BSAB/150267/2019. N Carrasco acknowledges the financial support of the European Research Council (ERC Starting Grant PRIMCHEM, Grant agreement no. 636829). A Chatain acknowledges ENS Paris-Saclay Doctoral Program
Databáze: OpenAIRE
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