Development of a monochromator for aberration-corrected scanning transmission electron microscopy
Autor: | Kazunori Somehara, Masanori Ashino, K Omoto, Toshikatsu Kaneyama, Tomohisa Fukuda, Eiji Okunishi, T. Saitoh, Akihiro Ikeda, Masaki Mukai, Tsukasa Hirayama, Yuichi Ikuhara |
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Rok vydání: | 2015 |
Předmět: |
Conventional transmission electron microscope
Materials science Wien filter business.industry Resolution (electron density) Scanning confocal electron microscopy Electron law.invention Optics Structural Biology law Scanning transmission electron microscopy Physics::Accelerator Physics Energy filtered transmission electron microscopy Radiology Nuclear Medicine and imaging business Instrumentation Monochromator |
Zdroj: | Microscopy. 64:151-158 |
ISSN: | 2050-5701 2050-5698 |
DOI: | 10.1093/jmicro/dfv001 |
Popis: | In this article, we report the development of a new 200-kV analytical electron microscope equipped with a monochromator with an integrated double Wien-filter system. It enables us to study the electronic structures of materials in detail using electron energy-loss spectroscopy (EELS) analysis at an atomic scale. A highly monochromated and isotropically round electron probe is produced on the specimen plane. The ultimate energy resolutions with 0.1-s acquisition times are measured to be 36 meV at 200 kV and 30 meV at 60 kV. In an EELS mapping experiment performed on SrTiO3 with a monochromated electron probe whose energy resolution is 146 meV, an elemental map exhibits atomic resolution. |
Databáze: | OpenAIRE |
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