Development of a monochromator for aberration-corrected scanning transmission electron microscopy

Autor: Kazunori Somehara, Masanori Ashino, K Omoto, Toshikatsu Kaneyama, Tomohisa Fukuda, Eiji Okunishi, T. Saitoh, Akihiro Ikeda, Masaki Mukai, Tsukasa Hirayama, Yuichi Ikuhara
Rok vydání: 2015
Předmět:
Zdroj: Microscopy. 64:151-158
ISSN: 2050-5701
2050-5698
DOI: 10.1093/jmicro/dfv001
Popis: In this article, we report the development of a new 200-kV analytical electron microscope equipped with a monochromator with an integrated double Wien-filter system. It enables us to study the electronic structures of materials in detail using electron energy-loss spectroscopy (EELS) analysis at an atomic scale. A highly monochromated and isotropically round electron probe is produced on the specimen plane. The ultimate energy resolutions with 0.1-s acquisition times are measured to be 36 meV at 200 kV and 30 meV at 60 kV. In an EELS mapping experiment performed on SrTiO3 with a monochromated electron probe whose energy resolution is 146 meV, an elemental map exhibits atomic resolution.
Databáze: OpenAIRE