Silicon MEMS Thermocatalytic Gas Sensor in Miniature Surface Mounted Device Form
| Autor: | Csaba Ducso, Alexander Pisliakov, Pavel Dzhumaev, Ivan Obraztsov, Konstantin Oblov, Ferenc Biro, Nikolay Samotaev |
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| Rok vydání: | 2021 |
| Předmět: |
Microelectromechanical systems
Inert Materials science surface mounted device Explosive material Silicon business.industry silicon MEMS ceramic MEMS gas sensor flip-chip chemistry.chemical_element QD415-436 Dissipation Chip Biochemistry Methane Analytical Chemistry chemistry.chemical_compound chemistry Optoelectronics Physical and Theoretical Chemistry business Flip chip |
| Zdroj: | Chemosensors; Volume 9; Issue 12; Pages: 340 Chemosensors, Vol 9, Iss 340, p 340 (2021) |
| ISSN: | 2227-9040 |
| Popis: | A reduced size thermocatalytic gas sensor was developed for the detection of methane over the 20% of the explosive concentration. The sensor chip is formed from two membranes with a 150 µm diameter heated area in their centers and covered with highly dispersed nano-sized catalyst and inert reference, respectively. The power dissipation of the chip is well below 70 mW at the 530 °C maximum operation temperature. The chip is mounted in a novel surface mounted metal-ceramic sensor package in the form-factor of SOT-89. The sensitivity of the device is 10 mV/v%, whereas the response and recovery times without the additional carbon filter over the chip are |
| Databáze: | OpenAIRE |
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