Study of the sub-surface damage of HgCdTe induced by chemical-mechanical polishing method

Autor:	李向阳 Li Xiangyang, 兰添翼 Lan Tianyi, 乔辉 Qiao Hui, 王妮丽 Wang Nili, 朱龙源 Zhu Longyuan, 赵水平 Zhao Shuiping, 陈心恬 Chen Xintian
Rok vydání:	2016
Předmět:	Surface (mathematics) Materials science Space and Planetary Science Chemical-mechanical planarization Aerospace Engineering Electrical and Electronic Engineering Composite material Atomic and Molecular Physics and Optics
Zdroj:	Infrared and Laser Engineering. 45:1204001
ISSN:	1007-2276
DOI:	10.3788/irla20164512.1204001
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0fb93e452774871007cb6392f9e0a060 https://doi.org/10.3788/irla20164512.1204001 Zobrazit plný text záznamu