Thermodynamic consideration of SiN and SiHN systems for silicon nitride powder production in thermal plasma

Autor: Života G. Kostić, Predrag Stefanovic, Pavle B. Pavlovic
Rok vydání: 1996
Předmět:
Zdroj: Ceramics International
ISSN: 0272-8842
DOI: 10.1016/0272-8842(95)00072-0
Popis: The results of equilibrium composition and total enthalpy computation in the temperature range of 1000–6000 K and at 1 bar for SiN and SiHN systems are presented in the paper. These data enable temperature and energy parameters determination and optimization of the process for ultrafine silicon nitride powder production, in which silicon powder evaporation in a nitrogen thermal plasma is followed by quenching with nitrogen or ammonia.
Databáze: OpenAIRE