3ω correction method for eliminating resistance measurement error due to Joule heating
| Autor: | Alberto Cagliani, Dirch Hjorth Petersen, Lior Shiv, Henrik Hartmann Henrichsen, Christoph Adelmann, Kasper A. Borup, Andreas R. Stilling-Andersen, Braulio Beltrán-Pitarch, Shibesh Dutta, Besira M. Mihiretie, Frederik Westergaard Østerberg, Peter Folmer Nielsen, Herman Oprins, Mikkel Fougt Hansen, Benny Guralnik, Thomas A. Marangoni, Ole Hansen, Bjorn Vermeersch |
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| Jazyk: | angličtina |
| Rok vydání: | 2021 |
| Předmět: | |
| Zdroj: | Guralnik, B, Hansen, O, Henrichsen, H H, Beltrán-Pitarch, B, Østerberg, F W, Shiv, L, Marangoni, T A, Stilling-Andersen, A R, Cagliani, A, Hansen, M F, Nielsen, P F, Oprins, H, Vermeersch, B, Adelmann, C, Dutta, S, Borup, K A, Mihiretie, B M & Petersen, D H 2021, ' 3 ω correction method for eliminating resistance measurement error due to Joule heating ', Review of Scientific Instruments, vol. 92, no. 9, 094711 . https://doi.org/10.1063/5.0063998 Guralnik, B, Hansen, O, Henrichsen, H H, Beltrán-Pitarch, B, Østerberg, F W, Shiv, L, Marangoni, T A, Stilling-Andersen, A R, Cagliani, A, Hansen, M F, Nielsen, P F, Oprins, H, Vermeersch, B, Adelmann, C, Dutta, S, Borup, K A, Mihiretie, B M & Petersen, D H 2021, ' 3ω correction method for eliminating resistance measurement error due to Joule heating ', Review of Scientific Instruments, vol. 92, no. 9, 094711 . https://doi.org/10.1063/5.0063998 |
| DOI: | 10.1063/5.0063998 |
| Popis: | Electrical four-terminal sensing at (sub-)micrometer scales enables the characterization of key electromagnetic properties within the semiconductor industry, including materials’ resistivity, Hall mobility/carrier density, and magnetoresistance. However, as devices’ critical dimensions continue to shrink, significant over/underestimation of properties due to a by-product Joule heating of the probed volume becomes increasingly common. Here, we demonstrate how self-heating effects can be quantified and compensated for via 3ω signals to yield zero-current transfer resistance. Under further assumptions, these signals can be used to characterize selected thermal properties of the probed volume, such as the temperature coefficient of resistance and/or the Seebeck coefficient. |
| Databáze: | OpenAIRE |
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