Laser ablation thresholds of silicon for different pulse durations: theory and experiment

Autor: M. Lenzner, Jörg Krüger, Jörn Bonse, Martin E. Garcia, Wolfgang Kautek, Harald Olaf Jeschke
Rok vydání: 2002
Předmět:
Zdroj: ResearcherID
ISSN: 0169-4332
DOI: 10.1016/s0169-4332(02)00458-0
Popis: The ultrafast laser ablation of silicon has been investigated experimentally and theoretically. The theoretical description is based on molecular dynamics (MD) simulations combined with a microscopic electronic model. We determine the thresholds of melting and ablation for two different pulse durations τ=20 and 500 fs. Experiments have been performed using 100 Ti:Sap-phire laser pulses per spot in air environment. The ablation thresholds were determined for pulses with a duration of 25 and 400 fs, respectively. Good agreement is obtained between theory and experiment.
Databáze: OpenAIRE