Laser Vapor Phase Synthesis of Submicron Silicon and Silicon Nitride Powders from Halogenated Silanes
| Autor: | J.G.M. Becht, R. Smulders, R.A. Bauer, Joop Schoonman, E.R. Geus, P.J. Van der Put |
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| Rok vydání: | 2008 |
| Předmět: |
Materials science
Silanes Silicon Inorganic chemistry Analytical chemistry Nanocrystalline silicon chemistry.chemical_element Nitride Amorphous solid chemistry.chemical_compound chemistry Electron diffraction Silicon nitride visual_art visual_art.visual_art_medium laser synthesis silicon nitride powder chlorosilane reaction ammonia ceramic powder Ceramic |
| Zdroj: | Proceedings of the 12th Annual Conference on Composites and Advanced Ceramic Materials, Part 1 of 2: Ceramic Engineering and Science Proceedings, Volume 9, Issue 7/8 Ceramic Engineering and Science Proceedings 9(7-8), 949-955. (1988) |
| DOI: | 10.1002/9780470310496.ch47 |
| Popis: | Laser-vapor-phase synthesis of Si/sub 3/N/sub 4/ spherical amorphous powders, with particle sizes of submicron dimensions, from SiH/sub 2/Cl/sub 2/-NH/sub 3/ and SiCl/sub 4/-NH/sub 3/ mixtures, was achieved using a 150-W CW CO/sub 2/ and a specially developed laser reactor. A concentric N/sub 2/ gas stream was used to guide the ceramic powders into a high-temperature electrostatic precipitator in which Si/sub 3/N/sub 4/ was separated from the waste product NH/sub 4/Cl. The powders were characterized using IR spectroscopy, X-ray fluorescence, EDX, XRD, and electron diffraction, and particle sizes were estimated using TEM and BET analyses. 15 references. |
| Databáze: | OpenAIRE |
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