Impact of secondary gas-phase reactions on microcrystalline silicon solar cells deposited at high rate
| Autor: | Gaetano Parascandolo, R. Bartlome, Benjamin Strahm, Andrea Feltrin, T. Söderström, Christophe Ballif, Grégory Bugnon |
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| Rok vydání: | 2010 |
| Předmět: |
Behavior
Physics and Astronomy (miscellaneous) Absorption spectroscopy Silicon business.industry Physics Far-infrared laser Generation Analytical chemistry chemistry.chemical_element Infrared spectroscopy Plasma Chemical vapor deposition Semiconductor Chemical-Vapor-Deposition Chemical engineering chemistry Vhfpecvd Discharge business Material properties |
| Zdroj: | Applied Physics Letters. 96:233508 |
| ISSN: | 1077-3118 0003-6951 |
| Popis: | The role of secondary gas-phase reactions during plasma-enhanced chemical vapor deposition of microcrystalline silicon is a controversial subject. In this paper, we show that the enhancement of such reactions is associated with the improvement of material properties of absorber layers deposited at high constant rate. We detect powder, a product of secondary gas-phase reactions, via infrared laser absorption spectroscopy, laser light scattering, and optical emission spectroscopy. As the powder formation is increased, we measure a systematic improvement of device performance. This demonstrates that secondary gas-phase reactions are not detrimental to the material quality of microcrystalline silicon deposited at high rate. © 2010 American Institute of Physics. doi:10.1063/1.3449571 |
| Databáze: | OpenAIRE |
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