High-efficiency Fresnel zone plates for hard X-rays by 100 keV e-beam lithography and electroplating
| Autor: | Murielle Salomé, Joan Vila-Comamala, Vitaliy A. Guzenko, Ray Barrett, Sergey Gorelick, Christian David |
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| Rok vydání: | 2011 |
| Předmět: |
Diffraction
Nuclear and High Energy Physics Fabrication Fresnel zone Materials science Au electroplating Physics::Optics X-ray optics hard X-rays 02 engineering and technology Zone plate Diffraction efficiency 01 natural sciences 7. Clean energy law.invention 010309 optics Fresnel zone plate Optics law 0103 physical sciences Microscopy Instrumentation Radiation business.industry electron-beam lithography 021001 nanoscience & nanotechnology Research Papers PMMA 0210 nano-technology business Electron-beam lithography |
| Zdroj: | Journal of Synchrotron Radiation |
| ISSN: | 0909-0495 |
| DOI: | 10.1107/s0909049511002366 |
| Popis: | The efficiencies of several Fresnel zone plates, that were fabricated using a direct-write method with high-energy electrons, were measured over a wide range of photon energies. The fabrication and characterization of Fresnel zone plates (FZPs) for hard X-ray microscopy applications are reported. High-quality 500 nm- and 1 µm-thick Au FZPs with outermost zone widths down to 50 nm and 70 nm, respectively, and with diameters up to 600 µm were fabricated. The diffraction efficiencies of the fabricated FZPs were measured for a wide range of X-ray energies (2.8–13.2 keV) showing excellent values up to 65–75% of the theoretical values, reflecting the good quality of the FZPs. Spatially resolved diffraction efficiency measurements indicate the uniformity of the FZPs and a defect-free structure. |
| Databáze: | OpenAIRE |
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