Fourier-transform infrared spectroscopy of ethyl lactate decomposition and thin film coating in a filamentary and a glow dielectric barrier discharge
| Autor: | Natalia Milaniak, Gaétan Laroche, Françoise Massines |
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| Přispěvatelé: | Procédés, Matériaux et Energie Solaire (PROMES), Université de Perpignan Via Domitia (UPVD)-Centre National de la Recherche Scientifique (CNRS), Université Laval [Québec] (ULaval) |
| Jazyk: | angličtina |
| Rok vydání: | 2021 |
| Předmět: |
Materials science
Polymers and Plastics thin film Analytical chemistry Atmospheric-pressure plasma 02 engineering and technology Chemical vapor deposition Dielectric barrier discharge dielectric barrier discharge 01 natural sciences 7. Clean energy chemistry.chemical_compound FSK 0103 physical sciences Molecule chemical composition Ethyl lactate Thin film Fourier transform infrared spectroscopy plasma 010302 applied physics Plasma [CHIM.MATE]Chemical Sciences/Material chemistry 021001 nanoscience & nanotechnology Condensed Matter Physics in-situ spectroscopy chemistry FTIR 0210 nano-technology biomaterials |
| Zdroj: | Plasma Processes and Polymers Plasma Processes and Polymers, Wiley-VCH Verlag, 2021, 18 (7), pp.2000248. ⟨10.1002/ppap.202000248⟩ |
| ISSN: | 1612-8850 1612-8869 |
| Popis: | International audience; Glow and filamentary regimes of Atmospheric Pressure Plasma Enhanced Chemical Vapor Deposition (AP-PECVD) in a planar Dielectric Barrier Discharge (DBD) configuration were compared for thin film deposition from ethyl lactate (EL) as a precursor. Space-resolved Fourier Transform Infrared Spectroscopy (FTIR) was used to study both the EL decomposition in the plasma phase and the composition of the thin film. EL chemical bonds concentration along the gas flow decreases progressively in the GDBD while it drastically oscillates in the FDBD, with values higher than that of the initial mixture. EL decomposition route depends on the discharge regime as the decrease of the concentration of the different investigated bonds are not the same for an identical amount of energy provided to the EL molecules. CO2 is systematically formed in the plasma reaching a maximum concentration of 25 ppm in the FDBD and 40 ppm in the GDBD mode. |
| Databáze: | OpenAIRE |
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