Self-organization of SiGe planar nanowires via anisotropic elastic field
| Autor: | Bernard Croset, Jean-Noël Aqua, Kailang Liu, Isabelle Berbezier, Antoine Ronda, Thomas Frisch, Luc Favre, Marco Abbarchi, Thomas David, Philippe Gaillard |
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| Přispěvatelé: | Institut des Matériaux, de Microélectronique et des Nanosciences de Provence (IM2NP), Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS), Institut de Physique de Nice (INPHYNI), Université Nice Sophia Antipolis (1965 - 2019) (UNS), COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-Centre National de la Recherche Scientifique (CNRS)-Université Côte d'Azur (UCA), Institut des Nanosciences de Paris (INSP), Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS), Université Pierre et Marie Curie - Paris 6 (UPMC)-Centre National de la Recherche Scientifique (CNRS), Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU), Institut Non Linéaire de Nice Sophia-Antipolis (INLN), Centre National de la Recherche Scientifique (CNRS)-Université Nice Sophia Antipolis (... - 2019) (UNS), COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-Université Côte d'Azur (UCA), Physico-chimie et dynamique des surfaces (INSP-E6), Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS)-Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS), Centre National de la Recherche Scientifique (CNRS)-Université Pierre et Marie Curie - Paris 6 (UPMC), Université Côte d'Azur (UCA)-Université Nice Sophia Antipolis (... - 2019) (UNS), COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-Centre National de la Recherche Scientifique (CNRS) |
| Jazyk: | angličtina |
| Rok vydání: | 2019 |
| Předmět: |
[PHYS]Physics [physics]
Materials science Physics and Astronomy (miscellaneous) Condensed matter physics Strain (chemistry) Plane (geometry) Relaxation (NMR) Nanowire 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Instability Condensed Matter::Materials Science Planar 0103 physical sciences [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] General Materials Science [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics 010306 general physics 0210 nano-technology Anisotropy Vicinal ComputingMilieux_MISCELLANEOUS |
| Zdroj: | Physical Review Materials Physical Review Materials, 2019, 3 (2), pp.023403. ⟨10.1103/physrevmaterials.3.023403⟩ Physical Review Materials, American Physical Society, 2019, 3 (2) HAL Physical Review Materials, 2019, 3 (2), pp.023403. ⟨10.1103/PhysRevMaterials.3.023403⟩ |
| ISSN: | 2475-9953 |
| Popis: | International audience; Strained epitaxial SiGe on vicinal Si(001) substrates develops a morphological instability perpendicular to the steps unlike the usual growth instabilities on vicinal substrates, eventually leading to planar nanowires. We assess both theoretically and experimentally the effect of strain anisotropy on the 1D elongation of the Asaro-Tiller-Grinfel'd (ATG) instability. The anisotropy of strain relaxation due to the presence of step edges is considered in a continuum model with two different effective strains in the surface plane. We show that the measured in-plane strain anisotropy and the theoretical model are consistent with the experimental morphologies. Nice network of ultrasmall aligned elongations are predicted resulting from a complex interplay of kinetic and energetic phenomena associated with strain anisotropy. |
| Databáze: | OpenAIRE |
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