Optical properties of silicon-rich silicon nitride for photonic integrated circuits

Autor:	Pruiti, Natale G., Gough, Christopher, May, Stuart, Sorel, Marc
Rok vydání:	2022
Zdroj:	Conference on Lasers and Electro-Optics
DOI:	10.1364/cleo_si.2022.sf3o.2
Popis:	The optical properties of silicon-rich silicon nitride are analyzed for different compositions, obtained by varying the deposition parameters. Here we demonstrate how the bandgap, refractive index, and thermo-optic coefficient depends on the relative silicon composition.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0bc04b89b9f58099bb6c5c6fff4c9136 https://doi.org/10.1364/cleo_si.2022.sf3o.2 Zobrazit plný text záznamu