Photochemistry of Ru precursors for photoassisted chemical vapor deposition

Autor:	Amy Walker, Valeria Kleiman, Olivia Hawkins, Nicholas Sheehan, Christopher Brewer, Lisa McElwee-White
Rok vydání:	2020
DOI:	10.1021/scimeetings.0c06239
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0b9ed6a9a76f1c6eaf4eea5ba0063717 https://doi.org/10.1021/scimeetings.0c06239 Zobrazit plný text záznamu