Electrical Contact Formation in Micro Four‐Point Probe Measurements
| Autor: | Ole Hansen, Peter F. Nielsen, Janusz Bogdanowicz, Steven Folkersma, Dirch Hjorth Petersen, Henrik Hartmann Henrichsen, Wilfried Vandervorst, Lior Shiv |
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| Rok vydání: | 2019 |
| Předmět: |
Materials science
Electrical contact business.industry Micro four-point probe Surfaces and Interfaces Condensed Matter Physics Electrical contacts Surfaces Coatings and Films Electronic Optical and Magnetic Materials FinFET Materials Chemistry Optoelectronics Point (geometry) Electrical and Electronic Engineering business |
| Zdroj: | Folkersma, S, Bogdanowicz, J, Petersen, D H, Hansen, O, Henrichsen, H H, Nielsen, P F, Shiv, L & Vandervorst, W 2020, ' Electrical Contact Formation in Micro Four-Point Probe Measurements ', Physica Status Solidi. A: Applications and Materials Science (Online), vol. 217, no. 5, 1900579 . https://doi.org/10.1002/pssa.201900579 |
| ISSN: | 1862-6319 1862-6300 |
| DOI: | 10.1002/pssa.201900579 |
| Popis: | Herein, the electrical contact formation between the electrodes of the micro four‐point technique and a semiconducting sample is described. It is shown that the contact is formed in two stages: a voltage‐induced electrical contact formation, followed by a current‐induced decrease in contact resistance. Moreover, a method is proposed allowing for precise control of the final contact resistance. Finally, it is demonstrated that the contacting process is similar on 1D fin structures, where the demonstrated control of the electrical contact is needed while measuring on nanometer‐wide fins in arrays with a pitch smaller than the electrode contact size. |
| Databáze: | OpenAIRE |
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