Integration of P-CuO thin sputtered layers onto microsensor platforms for gas sensing
| Autor: | Philippe Menini, Antoine Barnabé, Chabane Talhi, Audrey Chapelle, Frédéric Blanc, Lionel Presmanes, Imane El Younsi, Yohann Thimont, Philippe Tailhades, Corine Bonningue |
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| Přispěvatelé: | Centre National de la Recherche Scientifique - CNRS (FRANCE), Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE), Université Toulouse III - Paul Sabatier - UT3 (FRANCE), Centre interuniversitaire de recherche et d'ingenierie des matériaux (CIRIMAT), Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Institut de Chimie du CNRS (INC), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Service Instrumentation Conception Caractérisation (LAAS-I2C), Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Institut National Polytechnique de Toulouse - INPT (FRANCE) |
| Jazyk: | angličtina |
| Rok vydání: | 2017 |
| Předmět: |
Copper oxide
thin film Analytical chemistry 02 engineering and technology 01 natural sciences 7. Clean energy Biochemistry [SPI.MAT]Engineering Sciences [physics]/Materials gas sensor Analytical Chemistry law.invention chemistry.chemical_compound pulsed temperature law Thin film photolithography Instrumentation 021001 nanoscience & nanotechnology Atomic and Molecular Physics and Optics Pulsed temperature [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] Optoelectronics 0210 nano-technology Layer (electronics) Photolithography Materials science Matériaux Temperature cycling RF sputtering CuO tenorite metal oxide microsensor micro-hotplate Science des matériaux Article Sputtering Nitrogen dioxide Electrical and Electronic Engineering business.industry 010401 analytical chemistry Tenorite Metal oxide microsensor 0104 chemical sciences chemistry Micro-hotplate business Gas sensor Carbon monoxide |
| Zdroj: | Sensors (Basel, Switzerland) Sensors Sensors, MDPI, 2017, 17 (6), pp.1409. ⟨10.3390/s17061409⟩ Sensors, 2017, 17 (6), pp.1409. ⟨10.3390/s17061409⟩ Sensors; Volume 17; Issue 6; Pages: 1409 |
| ISSN: | 1424-8220 |
| DOI: | 10.3390/s17061409⟩ |
| Popis: | International audience; P-type semiconducting copper oxide (CuO) thin films deposited by radio-frequency (RF) sputtering were integrated onto microsensors using classical photolithography technologies. The integration of the 50-nm-thick layer could be successfully carried out using the lift-off process. The microsensors were tested with variable thermal sequences under carbon monoxide (CO), ammonia (NH3), acetaldehyde (C2H4O), and nitrogen dioxide (NO2) which are among the main pollutant gases measured by metal-oxide (MOS) gas sensors for air quality control systems in automotive cabins. Because the microheaters were designed on a membrane, it was then possible to generate very rapid temperature variations (from room temperature to 550 °C in only 50 ms) and a rapid temperature cycling mode could be applied. This measurement mode allowed a significant improvement of the sensor response under 2 and 5 ppm of acetaldehyde. |
| Databáze: | OpenAIRE |
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